张胜兵-安徽北方微电子研究院集团有限公司（2024）
演讲人姓名(Speaker):张胜兵 Shengbing Zhang
职位(Position):副总师 Deputy Chief Engineer
单位名称(Organization):
安徽北方微电子研究院集团有限公司 Anhui North Microelectronics Research Institute Group Corporation Limited
演讲题目(Topic):
先进微纳制造技术与应用
Advanced Micro-Nano Manufacturing Technology and Applications
演讲嘉宾简历(Speaker’sBiography)
张胜兵，安徽北方微电子研究院集团有限公司半导体及MEMS技术专业副总师、高级工程师，国家重点项目总师，中国MEMS行业协会理事，中国物联网与智能传感器联盟副秘书长，国家智能传感器专项总师。本人长期从事MEMS智能传感器技术开发、科技创新及产业化工作，同时负责MEMS晶圆制造平台的运营及技术管理。作为项目负责人承担国家级项目5项，省部级项目8项，作为核心骨干参与省部级以上项目10余项，主持研制的高性能MEMS陀螺仪、加速度计在惯性导航、姿态稳定、飞行控制领域获得广泛应用。形成了多项自主知识产权的技术成果，获得国家专利20项，发表论文20余篇，获得省部级以上科技进步奖8项，参与制定MEMS国家标准4项。
Zhang Shengbing, Deputy Chief Engineer and Senior Engineer in the Semiconductor and MEMS Technology Division of Anhui North Microelectronics Research Institute Group Corporation Limited. He also serves as Chief Engineer for National Priority Projects, a council member of the China MEMS Industry Association, and Chief Engineer of the National Smart Sensor Special Project.Mr. Zhang holds a master’s degree in Microelectronics and Solid-State Electronics from Hefei University of Technology and is currently pursuing a doctorate in Electronic Information at Tsinghua University. With a robust focus on MEMS smart sensor technology, he has significantly contributed to technological innovation and industrialization in this field. He is responsible for the operational and technical management of the MEMS wafer manufacturing platform.As a project leader, he has successfully led five national projects and eight provincial/ministerial projects, while also playing a key role in over ten additional projects. His team’s high-performance MEMS gyroscopes and accelerometers are widely applied in inertial navigation, posture stabilization, and flight control systems. Mr. Zhang has developed multiple independent intellectual property technologies, holds 20 national patents, and has published more than 20 academic papers. His contributions have been recognized with eight provincial and ministerial-level science and technology progress awards, and he has actively participated in the formulation of four national MEMS standards, establishing him as a leading expert in the field
摘要Abstract
MEMS & NEMS 微纳制造技术是集成电路工艺技术发展的专用技术，微传感器、微执行器、微结构和功能微纳系统制造的基本手段和重要基础。安徽北方微电子研究院集团有限公司拥有MEMS基础技术制造体系，旨在打通高性能MEMS制造关键环节，实现产业链制造端自主可控。
MEMS & NEMS micro-nano manufacturing technology is a dedicated technology for the development of integrated circuit technology, and the basic means and important basis for the manufacturing of micro-sensors, micro-actuators, micro-structures and functional micro-nano systems. Anhui North Microelectronics Research Institute Group Corporation Limited has a MEMS basic technology manufacturing system, aiming to open up the key links of high-performance MEMS manufacturing and realize the independent control of the manufacturing end of the industrial chain.
职位(Position):副总师 Deputy Chief Engineer
单位名称(Organization):
安徽北方微电子研究院集团有限公司 Anhui North Microelectronics Research Institute Group Corporation Limited
演讲题目(Topic):
先进微纳制造技术与应用
Advanced Micro-Nano Manufacturing Technology and Applications
演讲嘉宾简历(Speaker’sBiography)
张胜兵，安徽北方微电子研究院集团有限公司半导体及MEMS技术专业副总师、高级工程师，国家重点项目总师，中国MEMS行业协会理事，中国物联网与智能传感器联盟副秘书长，国家智能传感器专项总师。本人长期从事MEMS智能传感器技术开发、科技创新及产业化工作，同时负责MEMS晶圆制造平台的运营及技术管理。作为项目负责人承担国家级项目5项，省部级项目8项，作为核心骨干参与省部级以上项目10余项，主持研制的高性能MEMS陀螺仪、加速度计在惯性导航、姿态稳定、飞行控制领域获得广泛应用。形成了多项自主知识产权的技术成果，获得国家专利20项，发表论文20余篇，获得省部级以上科技进步奖8项，参与制定MEMS国家标准4项。
Zhang Shengbing, Deputy Chief Engineer and Senior Engineer in the Semiconductor and MEMS Technology Division of Anhui North Microelectronics Research Institute Group Corporation Limited. He also serves as Chief Engineer for National Priority Projects, a council member of the China MEMS Industry Association, and Chief Engineer of the National Smart Sensor Special Project.Mr. Zhang holds a master’s degree in Microelectronics and Solid-State Electronics from Hefei University of Technology and is currently pursuing a doctorate in Electronic Information at Tsinghua University. With a robust focus on MEMS smart sensor technology, he has significantly contributed to technological innovation and industrialization in this field. He is responsible for the operational and technical management of the MEMS wafer manufacturing platform.As a project leader, he has successfully led five national projects and eight provincial/ministerial projects, while also playing a key role in over ten additional projects. His team’s high-performance MEMS gyroscopes and accelerometers are widely applied in inertial navigation, posture stabilization, and flight control systems. Mr. Zhang has developed multiple independent intellectual property technologies, holds 20 national patents, and has published more than 20 academic papers. His contributions have been recognized with eight provincial and ministerial-level science and technology progress awards, and he has actively participated in the formulation of four national MEMS standards, establishing him as a leading expert in the field
摘要Abstract
MEMS & NEMS 微纳制造技术是集成电路工艺技术发展的专用技术，微传感器、微执行器、微结构和功能微纳系统制造的基本手段和重要基础。安徽北方微电子研究院集团有限公司拥有MEMS基础技术制造体系，旨在打通高性能MEMS制造关键环节，实现产业链制造端自主可控。
MEMS & NEMS micro-nano manufacturing technology is a dedicated technology for the development of integrated circuit technology, and the basic means and important basis for the manufacturing of micro-sensors, micro-actuators, micro-structures and functional micro-nano systems. Anhui North Microelectronics Research Institute Group Corporation Limited has a MEMS basic technology manufacturing system, aiming to open up the key links of high-performance MEMS manufacturing and realize the independent control of the manufacturing end of the industrial chain.