演讲人姓名(Speaker):王苑 WANG YUAN

职位(Position):助理教授 Assistant Professor

单位名称(Organization):澳门大学 University of Macau

演讲题目(Topic):

基于参数调制机理增敏MEMS谐振式传感器

Towards Parametric Modulation based Performance Augmentation for Resonant MEMS Sensors

演讲嘉宾简历(Speaker’sBiography)

王苑，博士，2008至2011年在英国伯明翰大学电气与电子工程系学习，获得电子工程学学士学位；2011至2012年在英国爱丁堡大学电子工 程系学习，获得生物电子学硕士学位；2015至2019年在比利时列日大学电气电子与计算机科学系学习，获得MEMS（微机电系统）方向博 士学位。2013至2014年于德国杜伊斯堡埃森大学电子与计算机工程系担任科研助理；2015年至2020年于比利时列日大学担任助教；2020年 至2023年于华中科技大学物理学院引力中心从事研究工作；2023年7月加入澳门大学微电子研究院，任职助理教授。主要研究方向为MEMS 谐振式传感器、MEMS硅微谐振器应用、MEMS谐振器非线性效应等。目前已在MEMS领域权威期刊和领域内顶级会议共发表论文45余篇。

Yuan Wang received his B.Eng. degree in Electronic Engineering from the University of Birmingham, Birmingham, U.K., in 2011; his M.Sc. degree in Bioelectronics from the University of Edinburgh, Edinburgh, U.K., in 2012, and his Ph.D. degree in microelectromechanical systems (MEMS) from the University of Liege in 2019. From 2020 to 2023, he worked as a research associate at Huazhong University of Science and Technology, PGMF and School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement & Hubei Key Laboratory of Gravitation and Quantum Physics, China. He is currently working as an assistant professor at the University of Macau, Insititute of Microelectronics. He has over 10 years of experience in developing high-performance MEMS sensors and resonators exploiting their nonlinear dynamics. His research interests include MEMS sensors, micro-resonators, MEMS system modeling, circuit design, and BioMEMS.

摘要Abstract

微机电系统（MEMS）无疑是现代电子科学领域中的一项关键技术，在日常生活中MEMS产品已无处不在，服务于各行各业并提供微型化、高性能、低功耗等解决方案。围绕传感器技术智能化发展趋势，MEMS器件不仅要进一步提高性能，也需具备多参量感测功能，符合传感 融合、万物互联、智慧城市等主题需要。报告将从MEMS谐振式传感器应用出发，分析多种基于参数调制机理的增敏方案，并综述课题组近期研究工作

Micro Electro Mechanical Systems (MEMS) technology undeniably stands out as a pivotal advancement in the realm of modern electronic science. MEMS products have permeated various aspects of daily life, catering to diverse industries and offering solutions characterized by miniaturization, high performance, and low power consumption. In light of the evolving trend towards intelligent sensor technology, MEMS devices must not only enhance their performance but also incorporate multi-parameter sensing capabilities to align with the requirements of sensor fusion, Internet of Things, and smart city initiatives. This report will commence by exploring the application of MEMS resonant sensors, delving into a detailed analysis of various sensitization schemes based on parameter modulation mechanisms. Additionally, it will encapsulate the recent research endeavors undertaken by the research group in this domain.